SiHCl_3氢还原过程的热力学分析  

Thermodynamic analysis of SiHCl_3 hydrogen reduction process

作　　者：何恩[1] 谢刚[1,2] 侯彦青[1] 林艳[1] 俞小花[1] 

机构地区：[1]昆明理工大学冶金与能源工程学院,云南昆明650093 [2]云南冶金集团总公司技术中心,云南昆明650031

出　　处：《化学工程》2011年第11期39-43,共5页Chemical Engineering(China)

基　　金：国家自然科学基金资助项目(50574045)

摘　　要：应用相关热力学数据研究了改良西门子法还原炉内涉及到的"Si—Cl—H"三元系复杂化学反应,进一步研究了温度、压强和初始进料摩尔比n(H2)/n(SiHCl3)对硅产率的影响,拟合得到硅产率随这些影响因素的变化图。通过分析得到:在低压、高温以及相对较大的初始进料比条件下,对SiHCl3氢还原过程更有利,硅产率也相对较高。并绘制了在初始进料比为15和压强为150 kPa的条件下,体系内平衡气相组分随温度的变化图。最后确定了最佳操作条件为:T=1 425 K,n(H2)∶n(SiHCl3)=15,p=1.5 kPa。在此条件下,硅的产率为34.815%。The complex chemical reactions in the Si-Cl-H system with relation to modified Siemens process were studied based on the thermodynamic data of related substance.And the influence of the temperature,pressure and initial feed mole ratio n（H2）/n（SiHCl3） on the silicon yield was investigated.The diagrams of the silicon yield as a function of temperature,pressure and initial feed ratio were plotted,respectively.The silicon yield is relatively high at high temperature,low pressure and big initial feed ratio n（H2）/n（SiHCl3） in the SiHCl3 hydrogen reduction system.The gas equilibrium composition diagrams were plotted as a function of temperature when the initial feed ratio n（H2）/n（SiHCl3） is 15 and the pressure is 150 kPa.Under the optimum conditions of 1 425 K,150 kPa and the initial feed mole ratio of 15,the yield of silicon is 34.815%.

关 键 词：热力学 多晶硅 改良西门子法 硅产率 

分 类 号：O613.72[理学—无机化学]