形状记忆合金驱动的常闭型主动阀(英文)  

Normally Closed Shape-Memory-Alloy Microvalve for Microflow Control

作　　者：杜敏[1,2] 叶雄英[1,2] 刘力涛[1,2] 施鏐佳[1,2] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084 [2]清华大学精密测试技术与仪器国家重点实验室,北京100084

出　　处：《纳米技术与精密工程》2011年第6期551-554,共4页Nanotechnology and Precision Engineering

基　　金：the Major State Basic Research Development Program of China("973" Program,2007CB310504)~~

摘　　要：本文研究了一种基于形状记忆合金(SMA)驱动的常闭型微阀.该微阀结构由弹性沟道层和形状记忆合金桥两部分组成,利用形状记忆合金微丝在相变过程中产生的拉力,打开微阀结构.通过对微阀的测试得出,其打开压力为4 000 Pa左右,开启时间和关闭时间分别为0.6 s和1 s.此外,当电流在0.14～0.30 A内,可得到6.7—75.2μL/min的近似线性流量调节范围.该形状记忆合金常闭微阀的制造采用聚二甲基硅氧烷(PDMS)的软光刻工艺实现,之后采用印刷电路板(PCB)上的形状记忆合金丝焊接组装搭建驱动结构.A novel normally closed shape-memory-alloy （SMA） microvalve was presented in this paper. The microvalve consists of an elastomer channel structure and an SMA bridge. The pulling force generated due to phase transition of the SMA wire is harnessed to open the normally closed microvalve. The breaking pressure of the SMA microvalve is about 4 000 Pa. The microvalve shows the on-off switching time of 0.6 s and 1.0 s, respectively. The flowrate regulation range of the microvalve is 6.7--75.2μL/ rain by adjusting the driving electrical current from 0. 14 A to 0. 30 A. The construction of the microvalve includes soft lithography of polydimethylsiloxane （PDMS） and SMA wire assembly on a printed circuit board （PCB） substrate.

关 键 词：微阀 形状记忆合金 微流体 常闭阀 

分 类 号：TH134[机械工程—机械制造及自动化]