基于频闪栅线投影的三维微结构高频动态测试系统  

High-frequency 3D Dynamic Measurement System of Micro-devices based on Stroboscopic Fringe Projection

作　　者：何小元[1,2] 朱飞鹏[1] 徐莹雋 史红健[1] 王澄非[4] 杨福俊[1] 

机构地区：[1]东南大学工程力学系,南京210096 [2]东南大学MEMS教育部重点实验室,南京210096 [3]东南大学电工电子实验中心,南京210096 [4]东南大学仪器科学与工程学院,南京210096

出　　处：《实验力学》2011年第5期592-602,共11页Journal of Experimental Mechanics

基　　金：国家自然科学基金(No.10727201)

摘　　要：在微电子机械系统(MEMS)中,执行器的动作主要通过微结构的微小变形来实现,故其动态变形测试具有十分重要的意义。本文采用栅线投影测量和频闪成像技术,研制了一套三维微结构高频动态测试系统,可以实现高达10MHz频率的动态变形测量。由于在频闪测量中,光源照明信号与器件激励信号需严格同步,本文采用直接数字频率合成和现场可编程门阵列(FPGA)技术,研制了超高频激光频闪同步控制器。通过相移栅线投影器及频闪位相控制器,获得了离面位移和背景强度,然后对背景强度运用数码图像相关技术实现面内位移的测量。In a microelectromechanical system （MEMS）, the action of actuator is implemented bytiny deformation of microstructure, so its dynamic deformation measurement is of great importance. A high-frequency up to 10MHz dynamic measurement system for 3D microstructure was developed, based on stroboscopic imaging technique and fringe projection. Since the synchronization between the stroboscopic illumination and the driving signal of specimen is required strictly, therefore, an ultra high-frequency laser stroboscopic synchronization controller was developed using both direct digital frequency synthesizer （DDS） and field-programmable gate array （FPGA）. The development of fringe projector and phase-shifting controller is presented in this paper as well. Based on the proposed system, iterative phase-shifting algorithm was adopted to obtain out-of-plane displacement and background intensity. Then digital image correlation （DIC） is performed to such background intensity to determine in-plane displacement.

关 键 词：高频频闪照明 同步控制 动态测试 栅线投影 数字图像相关 

分 类 号：TH74[机械工程—光学工程] O348.1[机械工程—仪器科学与技术]