同步辐射水平偏转压弯镜面形误差分析与补偿  

Analysis and compensation of slope error for synchrotron radiation horizontal deflected mirror

作　　者：卢启鹏[1] 高飒飒[1,2] 彭忠琦[1] 

机构地区：[1]中国科学院长春光学精密机械及物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《光学精密工程》2011年第11期2644-2650,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.11079035);应用光学国家重点实验室开放基金资助项目(No.O9Q33FQ091)

摘　　要：为提高同步辐射压弯镜面形精度,降低水平偏转压弯机构及镜子自重对压弯镜面形的影响,分析了影响压弯镜面形精度的因素,并提出了一种有效的重力平衡补偿方法。在研究水平偏转压弯机构压弯机理的基础上,对压弯镜面形进行误差分析;针对光束线中使用的压弯聚焦镜,利用有限元方法分析了影响面形精度的主要因素;最后,根据水平偏转压弯机构特点及误差分析结果,提出了重力平衡补偿方法。研究显示,镜子自重和冷却装置的重力对压弯镜面形的影响主要表现为柱面镜母线的弯曲,驱动杆重力对压弯镜面形的影响主要体现在子午斜率误差上。利用重力平衡方法对压弯镜面形误差进行补偿,结果显示,柱面镜母线产生的斜率误差均方根值由13.14μrad减小到0.15μrad,镜面在子午方向的斜率误差均方根值由8.21μrad减小到0.86μrad。由此表明,压弯镜面形误差分析及补偿方法行之有效,显著提高了水平偏转压弯镜的面形精度。To improve the precision of a bending mirror and to reduce the influence of a horizontal deflected bender and the mirror weight on the bending mirror,the factors that caused the slope errors were studied and a gravity compensation scheme for the horizontal deflected bender was presented.Firstly,the slope errors were studied on the basis of bending theory.Aiming at the bending focusing mirror used in the beamline,the main factors that affected its precision were analyzed by finite element method.Then,according to the characteristics of the horizontal deflected bender and the results of slope error analysis,a scheme was carried out to compensate the slope errors.The results indicate that the gravity of the mirror and a cooling device mainly had influence on the cylinder mirror generatrix,while the gravity of the driven-rod mainly affected the tangential slope error.After compensation,the slope error rms of cylinder mirror generatrix is reduced from 13.14 μrad to 0.15 μrad and the tangential slope error rms is reduced from 8.21 μrad to 0.86 μrad.It verifies that the slope error analysis and gravity compensation scheme proposed is effective,which improves the precision of the bending mirror greatly.

关 键 词：同步辐射 压弯机构 水平偏转 面形误差 补偿 

分 类 号：TH744.1[机械工程—光学工程]