嵌入式宽光谱在线膜厚监控系统设计  

Design of Embedded Wide Spectrum Online Monitoring System of Film Thickness

作　　者：李春喜[1] 邓华秋[1] 任豪 

机构地区：[1]华南理工大学物理系,广东广州510640 [2]广州市光机电技术研究院,广东广州510663

出　　处：《激光与光电子学进展》2011年第12期132-136,共5页Laser & Optoelectronics Progress

摘　　要：通过对宽光谱膜厚监控原理分析,设计出一套便携的嵌入式宽光谱在线膜厚监控系统。该系统基于ARM9内核微控制器S3C2440,采用Linux操作系统,使用跨平台Qt2开发可实时监控界面。系统通过USB光纤光谱仪采集光谱数据,S3C2440微控制器对采集的光谱数据通过宽光谱扫描、评价函数、单波长极值等多种方法进行综合处理,最终达到监控镀膜过程中的光学膜厚的目的。系统测试表明,该系统测量精度高、测量速度快且便于携带。We analyze the principle of wide spectrum film thickness monitoring and design a portable embedded wide spectrum monitoring system of film thickness. This system is based on ARM9 core processor S3C2440 and Linux operating system with real-time monitoring interface developed on cross platform Qt2. The system collects spectral data by the USB fiber spectrum instrument, and the S3C2440 processor processes spectral data by methods such as wide spectral scanning, evaluation function, and single wavelength extremum. Thus the purpose of monitoring the film thickness of optical coating is reached. The testing result of the system indicates that this system has high precision, fast response and convenience in carrying and operating.

关 键 词：薄膜 光学镀膜 嵌入式QT 宽光谱 膜厚监控 

分 类 号：O484.5[理学—固体物理]