计算全息法标定抛物面精度分析  

Accuracy Analysis on Paraboloid Calibration with Computer-Generated Holography

作　　者：谷勇强[1,2] 苗二龙[1] 高松涛[1,2] 隋永新[1] 杨怀江[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院研究生院,北京100049

出　　处：《中国激光》2011年第12期195-200,共6页Chinese Journal of Lasers

基　　金：国家科技重大专项02专项(2009ZX02205)资助课题

摘　　要：非球面高精度检测是目前光学检测研究的热点和难点之一。计算全息(CGH)技术是非球面检测的重要方法,但检测精度受到许多因素的影响。对CGH检测抛物面的误差进行了深入研究。应用Zemax软件对各种检测误差进行模拟计算,利用CGH对抛物面面形进行实际测量,对测量结果中较大的透射波前误差、彗差、球差等进行分析,并将CGH法与共焦小球法的检测进行了结果对比。结果表明,CGH法的设计和制造精度很高,标定基底的透射波前后,理论检测误差均方根(RMS)值低于4.2nm。实际检测中,CGH的离焦和抛物面偏心会造成较大的测量误差,精密调整后的测量误差RMS值优于4.5nm。Aspheric surface test is one of the priority research areas for high precision optical surface measurement. Computer-generated holography （CGH） is an important method to test aspheric surface, but its measurement accuracy is restricted by lots of influent factors. This paper focuses on the error analysis of paraboliod surface test with a corresponding CGH. Measurement errors are calculated by Zemax software. A paraboliod is practically tested by a corresponding CGH, and the mainly measurement errors, such as the CGH substrate＇s transmitted wavefront error, coma and sphere a berration are analyzed. The measurement results are compared with confocal ball method. Analytical and experimental results indicate that CGH design and fabrication can achieve very high accuracy. After the calibration of CGH substrate＇s transmitted wavefront, the root mean square （RMS） value of theoretic test accuracy is better than 4.2 nm. Defocus of CGH and decentration of paraboloid result in the major measurement error. After fine adjustment, the RMS value of practical measurement error will be better than 4.5 nm.

关 键 词：测量 计算全息法 抛物面测量 精度分析 Fizeau干涉仪 

分 类 号：O438.1[机械工程—光学工程] O439[理学—光学]