圆弓形散射元构建的二维硅基太赫兹波导的制备和表征  

Fabrication and Characterization of THz Waveguides with Silicon Wafer by Using Cylinder Segments as Scatterers

作　　者：万勇[1,2] 云茂金[1] 潘淑娣[1] 夏临华[1,2] 

机构地区：[1]青岛大学物理科学学院,山东青岛266071 [2]青岛大学重点实验室培育基地多功能材料所,山东青岛266071

出　　处：《光学学报》2011年第12期214-219,共6页Acta Optica Sinica

基　　金：国家自然科学基金(10744003);山东省自然科学基金(Y2008A09)资助课题

摘　　要：设计了一种新型的散射元——圆弓形散射元。以此散射元为基础,在硅片上制作出多种介质柱和空气孔型光子晶体波导。测量表明:圆弓形介质柱结构,较空气孔结构更有利于带隙的形成,而且随着参数e的改变,会引起光子禁带大小和位置的改变。对于同一介质柱结构,随着入射光与长轴夹角的增大,其反射谱中禁带的位置产生明显蓝移,反映出这一结构的各向异性特征。A novel kind of scattererscylinder segments has been designed. Based on this design, a series of photonic crystal waveguides, including structures of dielectric pillars in air and structures of air holes in dielectric, are fabricated on silicon wafer. The measurement results demonstrate that the structures of dielectric pillars in air can form band gaps more easily than the structures of air holes in dielectric, and the former can also tune the widths and positions of the band gaps by changing the parameter e. For the same structure of dielectric pillars in air, the band gap position in the optical transmission spectra moves toward the shorter-wavelength edge when the angle of incidence along the long axis becomes larger, indicating that the structure has the property of anisotropy.

关 键 词：光学设计 圆弓形 散射元 太赫兹 波导 

分 类 号：TN202[电子电信—物理电子学]