飞秒激光用超宽带金属介质膜光栅的优化设计和工艺容差分析  

Optimization and tolerance of ultra-broadband metal multi-layer dielectric gratings for femtosecond lasers

作　　者：孔伟金[1,2] 王书浩[1,2] 云茂金[1,2] 孙欣[1,2] 魏世杰[1,2] 张文飞[1,2] 郑併斌[1,2] 姜丽娜[1,2] 

机构地区：[1]青岛大学物理科学学院,山东青岛266071 [2]山东省高校光子学材料与技术重点实验室(青岛大学),山东青岛266071

出　　处：《光电子．激光》2011年第12期1769-1773,共5页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金项目(10804060,10904080);山东省泰山学者建设工程专项经费资助项目

摘　　要：基于严格耦合波理论,提出了金属介质膜光栅(MMDG)的带宽评价函数和波长偏离评价函数,并对宽光谱MMDG结构参数进行优化。数值模拟分析表明,当MMDG的槽深为290nm、剩余厚度为10nm、占空比取0.28和入射角为60°时,对以1053nm为中心波长的TE波,其-1级衍射效率优于97%的带宽达到190nm。对结构参数分析表明,设计的宽光谱MMDG工艺容差比较大,满足光栅的制备要求。Based on the rigorous coupled-wave theory, the merit functions for the diffraction bandwidth and variance from center wavelength are proposed to analyze the diffraction property of broadband metal multi-layer dielectric grating （MMDG）. When the groove depth, residual thickness, duty cycle and inci- dent angle are 290 nm, 10 nm,0.28 and 60° respectively, the optimized MMDG exhibits an ultra-broad- band top-hat diffraction spectrum with average efficiency exceeding 97 % over the 190 nm wavelength range centered at 1053 nm with TE mode. Numerical simulation shows that the optimized MMEG has excellent fabrication tolerance. The optimized broadband MMI2）G should be useful for chirped pulse compression.

关 键 词：衍射 金属介质膜光栅(MMDG) 超宽带 衍射效率 

分 类 号：O484.41[理学—固体物理]