铁电薄膜底电极La_(0.5)Sr_(0.5)CoO_3的结构及电性能研究  

Study on Structure and Electrical Properties of La_(0.5)Sr_(0.5)CoO_3 Bottom Electrodes of Ferroelectric Thin Films

作　　者：李博[1] 殷明志[1] 蒋迪波[1] 

机构地区：[1]西北工业大学理学院应用化学系,陕西西安710129

出　　处：《压电与声光》2011年第6期976-978,共3页Piezoelectrics & Acoustooptics

摘　　要：采用溶胶-凝胶(Sol-Gel)法在Si衬底上沉积一层La0.5Sr0.5CoO3(LSCO)薄膜底电极,并在不同的退火温度下表征薄膜的各种性质。X线衍射表明在550～750℃退火温度下制备的LSCO薄膜呈(110)取向的钙钛矿结构;谢乐公式估算薄膜的晶粒尺寸为25～50nm。扫描电子显微镜(SEM)观察结果显示:薄膜表面平整,结构致密。运用四探针法测量薄膜的体电阻,结果表明,750℃退火温度后渗氧处理可获得电阻率较低的La0.5Sr0.5CoO3薄膜。The La0.5Sr0.5CoO3（LSCO） thin film bottom electrodes were deposited on Si substrate by Sol-Gel process,and the properties of the thin films were characterized after being annealed at different temperatures.The X-ray diffraction investigation showed that LSCO thin films appeared perovskite phase structure with（110）-orientation only after being annealed at 550~750 ℃.The grain diameter of the LSCO is estimated to be about 25~50 nm by Scherrer＇s equation.The scanning electron microscopy（SEM） measurement showed that the films had smooth surface and compact structure.The bulk resistance of the films was measured by the four-probe measurement method.The results showed that the La0.5Sr0.5CoO3 film with lower resistivity had been obtained after annealing at 750 ℃ and then oxygenating.

关 键 词：溶胶-凝胶法 La0.5Sr0.5CoO3(LSCO)薄膜 底电极 结构性能 

分 类 号：TN386[电子电信—物理电子学]