第三组元氮元素对TaMo高温合金涂层组织和性能的影响  

Influence of the Third Element N on the Structure and Properties of TaMo Coating

作　　者：季鑫[1] 宓一鸣[1] 张朝民[1] 周细应[2] 赵新新[1] 言智[2] 周有余[1] 

机构地区：[1]上海工程技术大学基础教学学院,上海201620 [2]上海工程技术大学材料工程学院,上海201620

出　　处：《材料导报》2011年第22期70-73,共4页Materials Reports

基　　金：上海市高校优秀青年教师基金(gjd110033);上海市教委学科建设资助项目(11XK11);上海市教委资助项目(2011X34);上海市教委一般创新项目(10YZ172)

摘　　要：通过磁控溅射法在硅基材上制备了不同基底温度的TaMo和TaMoN涂层,采用原子力显微镜(AFM)和X射线衍射仪(XRD)研究了在第三组元N加入的情况下TaMo涂层的表面形貌和组织结构,采用CHI电化学分析仪分析了涂层的耐腐蚀性能,并分别对涂层进行了1000℃+300h高温氧化性能试验。实验结果表明,两种基底温度工艺下氮元素的加入对TaMo涂层的组织结构和表面形貌均有显著影响。另外,氮元素的加入可以提高TaMo涂层的耐腐蚀性能,但对TaMo涂层的耐高温性能没有改善。The TaMo and TaMoN coatings at different substrate temperatures were fabricated on silicon sub strate by magnetron sputtering method. The change of surface morphology and structure of TaMo coatings with the third element N were investigated by means of AFM and XRD. The corrosion resistance property of TaMo coatings were investigated by means of CHI-electric-chemistry analyse instrument, high temperature oxidation experiments were made for TaMo and TaMoN coating exposed to 1000℃ in air for 300h. The results show that the two substrate heated process have significant effect on microstructure of TaMo coatings with the third element N. Furthermore, the corrosion resistance properties of TaMo coatings increase with the third element N. However, the high temperature oxidation resistance properties of TaMo coatings decrease.

关 键 词：TaMo涂层 基底温度 腐蚀 表面形貌 

分 类 号：TG156.99[金属学及工艺—热处理]