基于微扫描镜的激光投影(英文)  

Micro Scanning Mirrors with Laser Diode for Pattern Generation

作　　者：李昭[1] 苑伟政[1] 吴蒙[1] 燕斌[1] 乔大勇[1] 刘耀波[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,西安710072

出　　处：《光子学报》2011年第11期1625-1629,共5页Acta Photonica Sinica

基　　金：The Program for the New Century Excellent Talents in University,Ministry of Education of China(No.NCET-10-0075);the National Natural Science Foundation of China(No.50805123

摘　　要：利用微机械加工技术制造出一种新型微扫描镜,结合半导体激光器,可用于投影显示.激光器发出的光束被两个分别沿着X轴、Y轴扭转的镜面相继反射,扫描出二维图形.实验测得扫描镜在15V电压,频率为扫描镜谐振频率2倍的方波信号驱动下,镜子的光学扫描角度达±12°.由于每个镜子都沿各自轴以简谐规律扭转,扫描所得投影为李萨如图形.通过分析图形的形成原理并用Matlab仿真,选出了适用用于任意图案显示的扫描镜谐振频率组合(X轴2 400Hz,Y轴2 425Hz).该组合可以形成194×192个像素点,刷新频率为25Hz.在此基础上提出了一种通过调制激光开关来进行投影显示的方法.A novel micro scanning mirror based on MEMS technology with a laser diode could be used in the projection of Lissajous patterns.Two micro scanning mirrors twisted in X-axis and Y-axis are used to deflect the laser beam onto the desired projection area to draw a 2-dimensional pattern.The optical scanning angle of the mirror can reach ±12° in 15V square wave driving signal at twice the mirror′s resonant frequency.Given the sinusoidal movement of the mirrors in each axis,the laser beam follows a Lissajous pattern.Through analyzing the principle of the generated patterns and simulating them with Matlab,oscillation frequency combination of 2 400 Hz（X-axis） and 2 425 Hz（Y-axis） for image generation is chosen.This combination can achieve 194×192 pixels at refresh frequency 25 Hz which is enough for movie frames.A method of projecting arbitrary images by modulating the laser diode through FPGA is given,which provides the basis for developing micro projectors.

关 键 词：微扫描镜 李萨如图 振动频率组合 激光投影 

分 类 号：TP211.6[自动化与计算机技术—检测技术与自动化装置]