锌还原法制备多晶硅过程影响硅产率的因素分析  

Influencing factors of silicon productivity during production of polycrystalline silicon by zinc reduction process

作　　者：侯彦青[1] 谢刚[1] 陶东平[1] 俞小花[1] 李荣兴[1] 姚云[1] 

机构地区：[1]昆明理工大学冶金与能源工程学院,昆明650093

出　　处：《北京科技大学学报》2011年第12期1516-1522,共7页Journal of University of Science and Technology Beijing

基　　金：国家自然科学基金资助项目(50574045)

摘　　要：对锌还原法过程中影响硅产率的因素进行研究.分析了当反应达到平衡,在0.1、0.3和0.6 MPa以及进料配比xZn/xSiCl4为2、4和8时,气相平衡组分分布与温度的关系.讨论了硅产率随温度、压强及xZn/xSiCl4的变化情况.结果表明,低温、一定压力和高xZn/xSiCl4对锌还原过程有利.确定了影响硅产率的主要副反应.最后得到锌还原法的最佳操作条件为温度控制在1 200 K左右、0.2 MPa及进料配比xZn/xSiCl4=4,在此条件下硅的理论产率可为90.3%.Some factors influencing silicon productivity were studied for producing polycrystalline silicon by zinc reduction.When the reaction reached equilibrium,the relation between gas phase compositions and temperature was analyzed at the Zn/SiCl4 molar ratio of 2,4 and 8 under the pressure of 0.1,0.3 and 0.6MPa,respectively.The changes of silicon productivity with gas pressure,temperature and Zn/SiCl4 molar ratio were discussed.The results show that lower temperatures,suitable pressures and higher Zn/SiCl4 molar ratios have a positive effect on the zinc reduction process.The major side-reactions which affect the silicon productivity were then determined.Finally the optimum operating conditions for the zinc reduction process were presented as 1200K,0.2MPa and the Zn/SiCl4 molar ratio of 4.Under the optimum operating conditions,the theoretical silicon productivity can be 90.3%.

关 键 词：多晶硅 锌 还原 产率 热力学 相平衡 

分 类 号：TN304.12[电子电信—物理电子学] O642.4[理学—物理化学]