喷射式微流体滴化机理的研究及应用  

Droplet Generation of Microfluidic Jetting and Its Applications

作　　者：张略[1] 胡泓[1] 曹勇[1] 

机构地区：[1]哈尔滨工业大学深圳研究生院,深圳518055

出　　处：《纳米技术与精密工程》2012年第1期78-82,共5页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(60974069);深圳市科技计划资助项目(JC200903120188A)

摘　　要：喷射式流体滴化技术作为一种高效精确的微小体积流体分配方式,已应用于诸多科技领域.为实现一种高效稳定的晶片标示打点器,根据计算流体力学理论对流体喷射滴化的过程进行数学建模,通过有限体积法对喷嘴内径为0.1 mm时液滴的生成和分离过程进行了数值模拟计算和理论分析.开发设计了由音圈电机驱动的喷射机构进行滴化实验,探讨了将其应用于晶片打点标示的可行性.数值仿真和实验数据都表明,非接触式喷射技术的引入,有效地提高了打点效率,改善了所得墨点的一致性,并减少了拖尾和卫星滴现象.Jetting dispensers are widely used in technical fields for their fast and accurate distribution of fluid substances in small volumes. Aiming at an efficient and stable inker for wafer die marking, gover- ning equations of fluid dynamics are set and numerical simulations are presented by finite volume method, to trace the generation and seperation of droplets through a jetting nozzle with the inner diameter of 0. 1 ram. A jetting dispenser actuated by voice coil motor is developed and key factors are discussed. Accord- ing to the results, this non-contact dispenser is capable of defective wafer die marking in dotting efficien- cy, uniformity and cleanness.

关 键 词：喷射式滴化 多相流 晶片标示 

分 类 号：TN305[电子电信—物理电子学] O242.1[理学—计算数学]