石英晶体谐振器的应力变化及力敏特性的关系  

Relationship between stress variation and the force-sensitive character of the quartz crystal resonator

作　　者：田文杰[1] 孙有彬[1] 周红云[1] 

机构地区：[1]北京信息科技大学传感器重点实验室,北京100101

出　　处：《北京信息科技大学学报（自然科学版）》2011年第6期12-16,共5页Journal of Beijing Information Science and Technology University

基　　金：国家自然科学基金资助项目(61072004;60968001);北京市自然科学基金资助项目(4082011);北京教委科技计划重点项目(KZ201110772040);北京市属高校人才强教计划项目(PHR200906132)

摘　　要：将半无限各向异性介质薄片在受集中力时介质内应力的分布结果,延推到薄圆形石英晶体谐振器,得到谐振器在受径向集中力作用时,其频率的相对变化与加力方位角及加力强度的关系,并与电极置于几何中心时谐振器的相对频率变化进行比对。用有限元方法对薄圆形石英晶片受径向力作用时不同位置的应力变化进行了分析,并在相应位置蒸镀电极,以形成谐振器,测试了不同位置谐振器的力频敏感特性,结果表明,理论计算及分析值与实验结果基本一致。Extending the stress distribution result in semi-infinite anisotropic media slice with centralized force to thin circular quartz crystal resonator,the relationship of frequency relative variation and adding force azimuth and adding force strength of the resonator with radial centralized force is obtained,and the result of comparing with the relative frequency variation of the resonator with electrodes on it＇s geometric center is also gained.At the same time,the stress variation in the different positions on the thin circular quartz crystal slice with radial force is analyzed using the finite element method,and electrode in the correspondent position is deposited to form resonator,with it＇s force-sensitive character in different positions tested.The result shows,the theoretical calculations and analysis is consistent with the experimental results.

关 键 词：石英晶体谐振器 应力变化 力敏特性 

分 类 号：O765[理学—晶体学] TM229.1[一般工业技术—材料科学与工程]