单电压控制的电润湿显示阵列的制备与研究  

The Preparation and Study of Electrowetting Display Array Controlled by Single Voltage

作　　者：林燕强[1] 王宁[1] 刘书婷[1] 徐立国[2] 徐庆宇[1] 肖长诗 

机构地区：[1]东南大学物理系,江苏南京211189 [2]南京航空航天大学材料科学与技术学院,江苏南京210016 [3]南京晶奥微光电技术有限公司,江苏南京211189

出　　处：《现代显示》2012年第1期23-27,共5页Advanced Display

摘　　要：文章介绍了利用匀胶机甩Teflon薄膜作为疏水亲油介质的方法制备电润湿显示的工艺,在此基础上,通过引入光刻工艺,选用SU-8负胶作为光刻胶,获得了具有良好的油滴浸润性的电润湿显示阵列。实验中获得的显示阵列具有良好的油滴浸润性,油滴在各个显示单元上覆盖全面,小电压时就开始收缩,电压加到30V时,油滴基本上收缩到角落,并且有良好的重复性,有望应用于下一代的显示器件。In this paper, we described the process of fabricating the electrowetting display, using teflon films thrown by a spin coater as the lipophilic hydrophobic medium. On this basis, by employing SU-8 photoresist as the lithophotography cofferdam, we got the electrowetting display array with good oil invasion. The oil droplets achieved complete coverage in every display units, began to shrink at small voltage, and when the voltage was 30V, shrank virtually into corners. These properties of the process, plus a good repeatability, make its application in the next generation of display devices promising.

关 键 词：电润湿 光刻 聚四氟乙烯 

分 类 号：TN949.199[电子电信—信号与信息处理]