扫描电子显微镜低真空模式的应用  

Application of the Low Vacuum Mode for SEM

作　　者：许亚娟[1] 陈剑峰 项彬[1] 宋子濂[1] 

机构地区：[1]中国铁道科学研究院金属及化学研究所,北京100081 [2]FEI公司(上海),上海201203

出　　处：《理化检验（物理分册）》2011年第12期786-789,共4页Physical Testing and Chemical Analysis(Part A:Physical Testing)

摘　　要：低真空模式是扫描电镜的一种新型观测模式,它的最大特点是可以对不导电样品直接进行观察。这样既避免了不导电样品表面由于电荷累积产生的假象,又省去了对样品表面进行导电喷镀,还有利于不导电样品其他信息的检测与分析。此外,扫描电镜低真空模式还可以对低致密度或多孔样品进行直接观察,这是高真空模式无法取代的。Low vacuum mode is a late-model kind of observing pattern for SEM.Its biggest characteristic is direct observation of non-conductive samples.In such a way,either the pseudo image caused by electric charge accumulation on the surface of non-conductive samples was avoided or the conductive coating on the surface of the samples was saved.Moreover,it facilitates testing and analysis of other information of the non-conductive sample.In addition,low vacuum mode is carried out on the samples that are not tight for direct observation,which is no substitute for high vacuum.

关 键 词：扫描电镜 低真空模式 应用 不导电样品 多孔样品 

分 类 号：TG115.215.3[金属学及工艺—物理冶金]