负偏压对多弧离子镀TiN薄膜的影响  

Effect of Negative Bias Voltage on TiN Coating Deposited by MAIP

作　　者：袁琳[1] 高原[1] 张维[1] 王成磊[1] 马志康[1] 蔡航伟[1] 

机构地区：[1]桂林电子科技大学材料科学与工程学院,桂林541004

出　　处：《表面技术》2012年第1期20-22,26,共4页Surface Technology

基　　金：国家自然科学基金(50764002);广西区自然科学基金重点项目(2010GXNSFD013008);信息材料广西重点实验室主任研究项目(桂科能0710908-06-Z)

摘　　要：采用不同偏压,在201不锈钢表面进行多弧离子镀TiN薄膜,研究了偏压对薄膜表面形貌、硬度、相结构及耐蚀性的影响。研究表明:薄膜表面存在着许多液滴颗粒,随着偏压的增加,液滴减少,但过大的偏压会使表面出现凹坑;薄膜的显微硬度随偏压的升高先增大后减小,偏压为-200V时的本征硬度为2 195HV;在3.5%的NaCl溶液中,TiN薄膜试样的耐蚀性比基体略有提高,在1mol/L的H2SO4溶液中,偏压-100V制备的试样耐蚀性最好,比基材提高了475倍。TiN coatings of different negative bias voltage were deposited on 201 stainless steel by multi-arc ion plating（MAIP）. The effect of negative bias voltage on the surface microstructure, hardness, phase structure and the corrosion resistance of the coatings was investigated. Results showed that there were many droplet particles in the sur- face. When the negative bias voltage increased, the number and size of droplets decreased; But when the substrate bias increased to a certain value, there appeared some pits. The hardness increased at first but decreased later with the in- creasing of the negative bias voltage. When the negative bias voltage was --200 V, the intrinsic hardness of TiN film was 2 195 HV. Compared with 201 stainless steel, the corrosion resistance of TiN coatings samples was improved slightly in 3.5G NaCI solution; In 1 mol/L H2SO4 solution, the corrosion resistance of the --100 V sample was best; Compared with untreated 201 stainless steel, the corrosion resistance of the --100V coating sample was increased 475 times.

关 键 词：多弧离子镀 负偏压 TIN薄膜 耐蚀性 

分 类 号：TG174.444[金属学及工艺—金属表面处理]