质子辐照下Mo/Si多层膜反射镜的微观结构状态  

Microstructures of Mo/Si multilayer mirror after proton irradiation

作　　者：关庆丰[1,2] 吕鹏[2] 王孝东[1] 万明珍[1,2] 顾倩倩[1,2] 陈波[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033 [2]江苏大学材料科学与工程学院,镇江212013

出　　处：《物理学报》2012年第1期324-330,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:10878004;50671042);应用光学国家重点实验室开放基金资助的课题~~

摘　　要：利用透射电子显微镜对质子辐照前后空间太阳望远镜Mo/Si多层膜的微观结构进行了表征,并对其辐照前后反射率的变化进行了测量.研究表明,Mo/Si多层膜经质子辐照后形成了一些缺陷结构,局部区域Mo/Si的周期性遭到破坏,Mo层与si层的宽度发生了变化,多层膜层与层之间的界面也比辐照前更为粗糙,部分层状结构由于质子辐照发生了明显的扭曲和折断等现象;此外,质子辐照导致了Mo/Si多层膜反射率的下降,这些微观缺陷的形成是光学性能降低的直接诱因.In this paper we characterize the microstructures of Mo/si multilager in space solar telescope induced by proton irradiation by transmission electron microscope（TEM）.The optical performances of the Mo/Si multilayer mirror before and after proton irradiation are also determined.The experimental results show that some defect structures are introduced after proton irradiation.The Mo/Si periodic structure is destructed in some irradiation regions.The widths of Mo layer and Si layer significantly change and the Mo/Si interface is much rougher than before irradiation.Moreover,the obvious distortions of the Mo/Si interface and the formation of the small islands in Mo layer are also found.Furthermore,proton irradiation reduces the reflectivity of Mo/Si multilayer mirror.The dominante mechanism of optical degeneration of the Mo/Si multilayer induced by proton irradiation should be attributed to the formation of the defect structures.

关 键 词：空间太阳望远镜 MO/SI多层膜 微观结构 反射率 

分 类 号：TH74[机械工程—光学工程]