微区薄层电阻四探针测试仪及其应用  

Four Probe Instrument for Measuring Sheet Resistance of Microareas and Its Application

作　　者：孙以材[1] 孟庆浩[1] 

机构地区：[1]河北工业大学电气信息学院,天津300130

出　　处：《现代仪器》2000年第1期37-42,共6页Modern Instruments

基　　金：国家自然科学基金资助课题;天津市发明三等奖(1998);天津市技术监督局认定(1997)

摘　　要：用斜置的四探针方法,依靠显微镜观察,将针尖置于微区图形的四个角区,用改进的范德堡公式可以得到微区的薄层电阻。本文对测准条件作了分析。并用该仪器测定了硼扩散片的薄层电阻分布。在测试过程中应用微处理器,加快了计算速度。The sheet resistance of microareas can be obtained from a modified Van der Pauw formula by using a inclined four - probe technique. The tip of probes is put at the corners of the microarea by inspection through a microscope. The condition for precise measurement is analyzed. This instrument has been used for measuring the sheet resistance distribution for Boron diffusion chip. In the measurement process,a microprocessor was used to speed up the calculation processes.

关 键 词：微区薄层电阻 范德堡法 四探针测试仪 计算机 

分 类 号：TM934.1[电气工程—电力电子与电力传动]