MOPCVD制备Ti(CN)硬膜研究  

Growth of Ti(CN) Films with Metal Organic Plasma Chemical Vapor Deposition

作　　者：石玉龙[1] 彭红瑞[1] 李世直[1] 

机构地区：[1]青岛化工学院等离子体表面技术研究所,青岛266042

出　　处：《真空科学与技术》2000年第1期60-62,共3页Vacuum Science and Technology

基　　金：山东省自然科学基金资助课题

摘　　要：采用金属有机物四异丙基钛 (Ti[OC3 H7]4 )为钛源 ,在辅助加热PCVD设备上进行沉积Ti(CN)涂层研究。并对涂层进行了显微硬度测量、扫描电镜观察和X射线衍射分析。结果表明 ,此法制备的Ti(CN)涂层其显微硬度可达 15 6 80N/mm2 。Ti(CN)涂层仍为柱状晶结构 ,Ti(CN)晶体的d(2 0 0 )值随着炉温和氢、氮比的变化而变化。切削实验证明 ,6mm高速钢钻头经MOPCVD Ti(CN)涂镀后提高使用寿命 7 3倍 ;经MOPCVD Ti(CN)涂镀的6 5mm×2 2mm× 5mm直齿三面刃铣刀使用寿命是非涂镀的 8倍。Ti(CN) films,grown on surfaces of cutting tools by metal organic plasma chemical vapor deposition,were studied with scan ning electron microscopy and X ray Diffraction.Our results show that the d (200) value of Ti(CN) is dependent on the substrate temperature and hydrogen/nitrogen ratio.The coating has a columnar structure with the maximal microhardness of 15680 N/mm 2.The coating may conside rably lengthen the lifetime of the cutting tools.For instance,the average lifetime for the  6 mm drills coated the films was found to be 7 3 times longer than that of the uncoated ones;whereas in the case of coated millers,the lifetime increases by a factor of 8.

关 键 词：PCVD技术 硬膜技术 四异丙基钛 碳氮化钛 

分 类 号：TB43[一般工业技术] O646.9[理学—物理化学]