红外探测器滤光膜的研究与制备  

Research and fabrication of infrared detector filter film

作　　者：孙岩[1] 付秀华[1] 石澎[1,2] 姚林[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]中山火炬职业技术学院光电工程系,广东中山528436

出　　处：《红外与激光工程》2012年第1期129-132,共4页Infrared and Laser Engineering

基　　金：吉林省科技发展计划项目(20080331-1)

摘　　要：为满足红外探测器在1.064μm和3～5μm双波段透射,在1.2～2.8μm波段反射,可适应复杂的环境条件、具有高稳定性和可靠性等要求,依据薄膜的设计理论,选择合理的膜系设计方法,借助TFC膜系设计软件对膜系结构进行优化设计。并采用电子束真空蒸发和离子辅助沉积技术,在蓝宝石晶体基底上镀制红外多波段滤光膜。同时对所使用的薄膜材料的光学、物理、化学和机械特性进行分析与研究。通过反复试验,优化工艺参数,使多波段滤光膜得以实现。对所制得的薄膜进行测试,基本满足红外探测器的使用要求。In order to satisfy the requirements of infrared detector that can penetrate in 1.064 μm and 3-5 μm double wave bands,be reflected in 1.2-2.8 μm wave band,work in the harsh environmental condition and have high stability and reliability etc,the reasonable design of the coating was discussed.The reasonable coating design method that based on the design theory of film and used TFC software of coating design was chosen to optimize thin film′s structure.Infrared multi-wave bands filter film was deposited on sapphire crystal substrates by using the electron beam vacuum evaporation and the ion auxiliary deposition technology.Moreover,the optical,physical,chemical and mechanical characteristics of the film material were studied and analyzed.The multi-wave bands filter film was made successfully by means of continuous experiment and optimization of technical parameters.The film was tested and analyzed and the result satisfied the basis use requirements of the infrared detector.

关 键 词：光学薄膜 多波段滤光膜 红外增透膜 离子辅助沉积 

分 类 号：O484[理学—固体物理]