采用ZnO压电薄膜的声光偏转器研制  

Study on the Acousto-Optic Deflector Basedon the ZnO Piezoelectric Film

作　　者：刘彪[1] 张晓容[1] 易平[1] 朱吉[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060

出　　处：《压电与声光》2012年第1期21-22,26,共3页Piezoelectrics & Acoustooptics

摘　　要：研究了基于ZnO压电薄膜结构的1GHz声光偏转器。通过采用半导体工艺流程制备器件,并利用射频网络分析仪对实验器件进行了测试,得到器件达到的性能指标:中心频率1.05GHz、带宽500MHz、衍射效率1%、渡越时间1.5μs。The acousto-optic deflector（AOD） of 1 GHz frequency based on ZnO piezoelectric film has been studied in this paper.The AOD device was fabricated by the semiconductor process technique and was tested by the RF network analyzer.The acousto-optic deflector with the central frequency of 1.05 GHz,bandwidth of 500 MHz,diffraction efficiency of 1% and transit time of 1.5 μs has been obtained.

关 键 词：声光偏转器 ZNO压电薄膜 带宽 

分 类 号：TM21[一般工业技术—材料科学与工程] TN91[电气工程—电工理论与新技术]