镀膜金刚石膜层的俄歇分析  

AES Analysis on coating of coated diamond

作　　者：徐燕军[1,2] 柳成渊[1,2] 尹翔[1,2] 沈翔[1,2] 罗锡裕[1,2] 

机构地区：[1]中国钢研科技集团有限公司,北京100081 [2]安泰科技股份有限公司,北京100081

出　　处：《金刚石与磨料磨具工程》2012年第1期50-52,共3页Diamond & Abrasives Engineering

摘　　要：镀膜金刚石在现代金刚石制品中的应用愈来愈重要,我们对镀铬和镀钛两种金刚石的镀层作了俄歇分析。结果表明:俄歇能较准确分析膜层元素原子数分数、膜层厚度;所用镀铬和镀钛金刚石,镀层中分别除碳、铬元素,碳、钛元素外,均含有氧元素,这是镀层表面氧化所致;所用镀铬和镀钛金刚石,相对稳定的镀层厚度分别约为25 nm,360 nm。XRD线谱分析,镀铬金刚石镀层由于太薄,未发现衍射相,镀钛金刚石镀层却有TiC为基的固溶体形成。The coated diamonds are getting more and more important in the application of modern diamond products. In this article coatings on chrome coated and titanium coated diamonds are studied using AES . The results indicated that AES can determine the content of elements and thickness of coating accurately ; the coated diamonds all contained oxygen beside carbon, chrome and titanium, this was caused by coating surface oxidation ; the thickness of chrome coating was about 25 nm and that of titanium coating was about 360 nm. XRD analysis indicated that no diffraction phase was found in the chrome coating which was too thin, while TiC-based solid solution was found in the titanium coating .

关 键 词：镀膜金刚石 俄歇分析 镀层 

分 类 号：TQ164[化学工程—高温制品工业]