PSD精密薄板在线多点测厚系统  

PSD Precise Sheet Online Multi-Point Thickness Measurement System

作　　者：宋殿友[1,2] 刘铁根[1] 丁小昆[1] 李志宏[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]天津理工大学电信学院,薄膜电子与通信器件天津市重点实验室,天津300384

出　　处：《应用激光》2012年第1期54-57,共4页Applied Laser

基　　金：国家自然科学基金资助项目(项目编号:60627002;30770597);天津市科技支撑计划资助项目(项目编号:09ZCKFGX01400);天津市应用基础研究计划资助项目(项目编号:06YFJZJC00400)

摘　　要：为满足精密薄板厚度在线测量的精密性、实时性和可靠性要求,将基于调制、带通滤波和峰值检测的信号处理技术与激光三角法相结合,设计了高精度PSD微位移传感器,并利用多个传感器和差动三角法制作了采样速率达到1 kHz,测量厚度范围为6 mm,测量精度可达10μm的薄板多点测厚系统原理样机。系统基于SOPC技术,在FPGA内扩展了多个串口作为测量数据传输通道,同时采用ARM9微处理器做控制中心,利用其内部的SMC(静态存储控制器)与FPGA连接,实现了测量数据的实时传输、处理和显示。最后,对系统的稳定性以及影响因素进行了测量和分析。The online measurement of precise sheet thickness needs to be precise,real-time and reliable.In order to meet the requirements above,we designed a PSD（position sensitive detector） micro-displacement sensor,based on the combination of laser triangulation and signal processing technology mainly including modulation,band-pass filtering and peak detection.Meanwhile,we produced a sheet multi-point thickness measurement prototype which the sampling rate up to 1 kHz,the measure thickness up to 6 mm and the measurement accuracy up to 10μm by using PSD micro-displacement sensors and differential triangulation.The system expanded more than one serial port as the channels of measurement data based on SOPC technology in FPCA,while using ARM9 microprocessor as a control center,using its internal SMC（static memory controller） to connect FPCA,and the measurement data get a real -time transmission,processing and display.And last,the system stability and interfering factors were also measured and analyzed.

关 键 词：PSD 差动激光三角法 微位移 薄板测厚 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]