静电微泵的3D流固耦合动态特性分析  

A Study of 3D Full Coupled Field Dynamic Characteristics of an Electrostatic Valveless Micropump

作　　者：董金新[1] 林谢昭[2] 应济[2] 李俊[2] 

机构地区：[1]温州职业技术学院,温州325035 [2]浙江大学,杭州310027

出　　处：《中国机械工程》2012年第5期599-603,共5页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(50475104);浙江省自然科学基金资助重点项目(Z106519)

摘　　要：采用任意拉格朗日—欧拉(ALE)描述建立了无阀微泵的静电-结构-流体全耦合三维模型,数值仿真表明:泵内流体的动态特性与泵膜的运动存在着密切的关系;扩散/收缩口单元两端的压力差必须达到一定值后才有"整流"泵送效用;泵腔内流体压力的分布几乎一致;流体流动的最大雷诺数远小于宏观条件下认定的临界雷诺数;流体黏滞损失的非线性不容忽视。A 3-Dimensional accurate analysis of the electrostatic valveless micropump involved in electrostatic dynamics,structural dynamics and fluid dynamics of the system.This was made by using multi-field coupled analysis.The results show that the dynamic characteristics of fluid in the micropump are dependent highly on the vibration of flexible membrane.The flow rectification function of the diffuser/nozzle element will work only after the pressure difference between the two ends of the element reaches a critical value.In the pump chamber,the fluidic press distribution almost independent of the depth variation.The maximum of Reynolds numbers is far less than the traditional critical Reynolds number.Due to the increasing demands for accuracy,the nonlinear features of viscous loss of the fluid can no longer be neglected or simplified,but have to be taken into account in detail.

关 键 词：无阀微泵 流固耦合 静电驱动 数值仿真 MEMSCAD 

分 类 号：TH38[机械工程—机械制造及自动化] TP271.3[自动化与计算机技术—检测技术与自动化装置]