基于椭偏法的火棉胶薄膜光学参数测量  

Collodion film optical parameters measurement based on ellipsometry

作　　者：王海姣[1] 王党社[1] 乔若飞[1] 

机构地区：[1]西安工业大学理学院,陕西西安710032

出　　处：《光学仪器》2012年第1期91-94,共4页Optical Instruments

摘　　要：火棉胶醋酸戊脂溶液常被用于医学治疗,在分析材料内部结构时,利用火棉胶醋酸戊脂溶液成膜后表现出的致密性和透光性,将其作为待分析材料的底膜,采用电子衍射的方法获得材料结构。火棉胶薄膜的厚度及材料膜厚对电子衍射结果影响很大,采用光纤光谱仪测量材料膜厚时需要知道火棉胶薄膜的折射率和厚度。为获得不同体积火棉胶醋酸戊脂溶液捞制的火棉胶薄膜的厚度和折射率,利用椭偏原理,采用光谱反射型椭偏仪进行测量,拟合所建模型为Srough/Cauchy/BK7。实验结果表明:该模型能够很好地表征薄膜结构,并得到体积不同的火棉胶醋酸戊脂溶液所捞制的薄膜厚度不同,体积也越大,火棉胶膜厚也越大,Cauchy系数A、B、C系数基本相同。Collodion amyl acetate solution is often used in medical treatment.In the analysis of inner structure of materials,the compactness and light transmittance of collodion amyl acetate solution film is used as the bottom film to obtain material structure together with the electron diffraction method.Collodion film thickness and film thickness on electron diffraction have huge impact upon the results.When fiber optic spectrometer is used to measure the thickness of materials,collodion film refractive index and thickness are needed to know.In order to obtain different volume collodion amyl acetate solution for the collodion film thickness and refractive index,ellipsometric theory is employed here and reflective ellipsometric spectroscopy is used for measurements.The resulting model is Srough/Cauchy/BK7.The results of the experiment show that the fitting model can well present the structure of the thin film.Besides,the volume of different collodion amyl acetate solution for preparing film thickness is different,the larger the volume,the greater the thickness of the collodion membrane,while Cauchy coefficient A,B,C coefficient is basically the same.

关 键 词：火棉胶 椭偏法 薄膜厚度 折射率 

分 类 号：O484.5[理学—固体物理]