Fabrication and characteristics of low loss and single-mode channel waveguides based on DNA-HCTAC biopolymer material  

作　　者：张飞雁 王振永 颜承恩 周骏 

机构地区：[1]Department of Physics,Faculty of Science,Ningbo University

出　　处：《Optoelectronics Letters》2012年第2期97-100,共4页光电子快报（英文版）

基　　金：supported by the International Collaboration Project of Ningbo (No.2010D10018);the Research and Innovation Project of Zhejiang Province (No.2011R405050);the Research Fund of Graduate of Ningbo University (No.G11JA001)

摘　　要：A novel biopolymer, deoxyribonucleic acid-hexadecyltrimethylammonium chloride (DNA-HCTAC), is used as the core layer material in optical waveguide, and the cleanroom technology is successfully applied to fabricate the single-mode channel waveguides with low propagation loss. The prepared DNA-HCTAC material shows high optical quality at the optical telecommunication wavelengths, such as high transparency, relatively high refractive index and low birefringence. In the fabrication approach, polymethyl methacrylate (PMMA) is used as a barrier layer to protect the DNA-HCTAC material from the corrosive of photoresist developer, and the etching conditions are optimized to form the smooth wall and sharp cross-section of the waveguide. Lastly, the optical characteristics of DNA-HCTAC channel waveguides are measured. The results show that the DNA-HCTAC waveguide operates with single-mode propagation and has a low optical loss.

关 键 词：Biomolecules Chlorine compounds Organic acids PHOTORESISTS Plasma filled waveguides Refractive index WAVEGUIDES 

分 类 号：TB324[一般工业技术—材料科学与工程]