微机械梳齿谐振器的可靠性仿真  

Simulations on Reliability of MEMS Comb-drive Resonators

作　　者：高杨[1] 王强[2] 秦燃[3] 唐海林[1] 

机构地区：[1]中国工程物理研究院电子工程研究所。四川绵阳621900 [2]西南科技大学制造科学与工程学院,四川绵阳621010 [3]西南科技大学信息工程学院,四川绵阳621010

出　　处：《半导体光电》2012年第1期34-38,共5页Semiconductor Optoelectronics

基　　金：中国工程物理研究院科技发展基金重点课题(2008A0403016,2010A0302013)

摘　　要：针对微加工工艺引起的微机械梳齿谐振器可靠性问题进行了仿真分析。包括:深反应离子刻蚀工艺造成梳齿与弹性支撑梁侧壁倾斜对驱动力、谐振频率和谐振次数的影响;残余应力和杂质不均等因素在弹性支撑梁上产生的微裂纹对谐振器动力学的影响。仿真结果表明:当梳齿与弹性支撑梁的侧壁向内倾斜时,驱动力、谐振频率与倾斜角成反比;向外倾斜时,驱动力、谐振频率与倾斜角成正比;谐振频率与微裂纹的个数成反比;两者均会导致谐振次数(寿命)降低。Simulations were performed on the reliability of micromechanical comb-drive resonators fabricated by micromachining technology.The effects of the inclination of the comb fingers and the sidewall on the driving force,resonant frequency and numbers and the effects of the cracks caused by the factors as residual stress and impurities in the materials on the dynamics of the resonators were analyzed numerically.Simulations show that when the comb finger and the sidewall of the supporting beam incline inward,the driving force and the resonant frequency are both inversely proportional to the angle of inclination;on the contrary,the two are in proportion to the angle of inclination.It is also concluded that the resonant frequency is in inverse proportion to the number of the cracks.Besides,the operating life of the resonator is abridged in both cases.

关 键 词：微机械梳齿谐振器 微机械加工 有限元 寿命 可靠性 

分 类 号：TN305[电子电信—物理电子学]