DEM技术中微复制工艺研究  

Study on microreplication process in DEM technique

作　　者：陈迪[1] 雷蔚[1] 李昌敏[1] 张卫平[1] 蔡炳初[1] 

机构地区：[1]上海交通大学信息存储研究中心

出　　处：《微细加工技术》2000年第1期61-65,共5页Microfabrication Technology

基　　金：国家自然科学基金!(198750 6 0 );上海市教委曙光计划资助项目

摘　　要：利用DEM (Deepetching ,Electroforming ,Microreplication)技术获得的微复制金属模具进行了微复制工艺研究。对微复制工艺参数进行了优化 ,在PC、PMMA和POM塑料上获得了高深宽比的微结构 ,并对PC。Microreplication process was studied by using a metallic mold insert fabricated by DEM ( Deepetching, Electroforming, Microreplication) technique. The process parameters of microreplication process were optimized. High aspect ratio microstructures of polycarbonate (PC), polymethyl methacrylate (PMMA) and polyoxymethylene(POM) were fabricated and Their qualities were investigated.

关 键 词：DEM技术 微复制 微结构 

分 类 号：TP271.2[自动化与计算机技术—检测技术与自动化装置] TN4[自动化与计算机技术—控制科学与工程]