高性能SS-AlN金属陶瓷真空太阳集热管的制备  

Preparation of high performance evacuated SS-AlN cermet solar collector tubes

作　　者：池华敬 郭帅 熊凯 王双 周旭 苗建朋 陈革 章其初 

机构地区：[1]皇明太阳能股份有限公司镀膜研发中心,山东德州253000

出　　处：《真空》2012年第2期56-60,共5页Vacuum

摘　　要：采用真空磁控溅射沉积SS-AlN金属陶瓷太阳选择性吸收涂层。涂层光学功能层的制备，先采用铜靶溅射Cu红外反射层；再采用不锈钢（SS）和铝两金属靶在Ar和N2的混合气体中同时溅射沉积SS-AlN金属陶瓷吸收层；最后采用Al靶在Ar和N2中反应溅射沉积AlN减反射层。金属陶瓷吸收层由高、低SS体积份额的两吸收子层组成。优化溅射镀膜工艺参数获得高性能吸收涂层，太阳吸收比α（AM1.5）高达0．956±0．003（国标GB：α≥0．86），比GB高10％；红外发射比ε仅为0．043±0．003（GB：ε≤0．08）。制备成Ф58×2100mm全玻璃真空太阳集热管，80℃平均热损系数仉，仅为0．47±0．01w/m^2℃（GB：ULT≤0．85w/m^2℃），比GB低0．38w/m^2℃，性能提高45％。制备的真空集热管具有良好的真空品质，集热管内管加热350℃恒温480h后，吸气镜面轴向长度平均消失率仅为2-3％，集热管真空品质优于GB高达100倍以上（GB：350℃恒温48h，镜面消失率≤50％）。Stainless steel-aluminium nitride （SS-AlN） cermet solar selective coatings were deposited by vacuum magnetron sputtering. The depositing process of the SS-AlN solar coatings is described as follows. Firstly, a Cu inferred reflection layer was deposited with Cu target. Secondly, a SS-AlN cermet absorber layer was deposited by sputtering simultaneously with Al and SS two metallic targets in the gas mixture of Ar and N2. Finally, an AlN anti-reflection layer was deposited with Al target in the gas mixture of Ar and N2. The SS-A1N cermet absorber layer is composed of a double cermet layer film structure incorporating two distinct cermet layers, a high SS volume fraction absorbing layer and a low SS volume fraction absorbing layer. A solar absorptance α of 0.956±0.003, and emittance e of 0.043±0.003 were achieved with optimized sputtering deposition parameters. The optical performance of the SS-AlN solar absorber coatings were unchanged after baking-evacuating the solar collector tubes at 450℃ for 40min. The mean heat loss coefficient ULT at 80℃ as low as 0.47±0.01W/m^2℃ was achieved for the prepared evacuated solar collector tubes with dimension Ф58×2100mm. The vacuum performance of the prepared solar collector tubes is excellent, the disappearing rate of a getter mirror surface is only 2-3% after inner tube heating at 350℃ for 480h.

关 键 词：磁控溅射 太阳选择性吸收涂层 SS-AlN金属陶瓷 真空集热管 太阳吸收比 红外发射比 平均热损系数 

分 类 号：TK513.3[动力工程及工程热物理—热能工程] TB43[一般工业技术]