Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction  

作　　者：张祖伟 温志渝 胡晶 

机构地区：[1]Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology,Chongqing University,Chongqing 400030,China [2]National Center for International Research of Micro/Nano-System and New Material Technology,Chongqing University,Chongqing 400030,China [3]Microsystem Research Center of Chongqing University,Chongqing 400030,China

出　　处：《Journal of Semiconductors》2012年第4期51-56,共6页半导体学报（英文版）

摘　　要：The design and simulation of a novel microoptoelectromechanical system （MOEMS） accelerometer based on Raman-Nath diffraction are presented. The device is planned to be fabricated by microelectromechanical system technology and has a different sensing principle than the other reported MOEMS accelerometers. The fun- damental theories and principles of the device are discussed in detail, a 3D finite element simulation of the flexural plate wave delay line oscillator is provided, and the operation frequency around 40 MHz is calculated. Finally, a lecture experiment is performed to demonstrate the feasibility of the device. This novel accelerometer is proposed to have the advantages of high sensitivity and anti-radiation, and has great potential for various applications.The design and simulation of a novel microoptoelectromechanical system （MOEMS） accelerometer based on Raman-Nath diffraction are presented. The device is planned to be fabricated by microelectromechanical system technology and has a different sensing principle than the other reported MOEMS accelerometers. The fun- damental theories and principles of the device are discussed in detail, a 3D finite element simulation of the flexural plate wave delay line oscillator is provided, and the operation frequency around 40 MHz is calculated. Finally, a lecture experiment is performed to demonstrate the feasibility of the device. This novel accelerometer is proposed to have the advantages of high sensitivity and anti-radiation, and has great potential for various applications.

关 键 词：ACCELEROMETER MOEMS Raman-Nath diffraction FPW delay line oscillator 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置]