掠入射X射线散射法研究超光滑镜面粗糙度  

Studies of the super-smooth mirror roughness by grazing incidence X-ray scattering method

作　　者：杜韦陶[1] 宋丽[1] 王玉柱[1] 罗红心[1] 张翼飞[1] 王劼[1] 

机构地区：[1]中国科学院上海应用物理研究所,上海201204

出　　处：《核技术》2012年第4期255-259,共5页Nuclear Techniques

基　　金：国家青年科学基金项目(No.11105215)资助

摘　　要：在Xiaomin Tong等的理论上发展了一个二维理论模型,建立散射光强分布与超光滑表面功率谱密度(PSD)的关系。在上海同步辐射光源小角散射实验站上,用不同粗糙度的210 mm和320 mm长的超光滑反射镜进行掠入射X射线散射法(GIXRS)实验,测量散射分布并进行处理,计算出两块反射镜的表面均方根粗糙度(RMS)。与白光干涉法测量结果的比对结果表明,根据这种理论进行数据处理得到的RMS值,与白光干涉法的测量结果非常符合。In this work, surface roughness of two large-size super-smooth mirrors, of 210 and 320 mm in length, was studied by grazing incidence X-ray scattering method （GIXRS）. A two-dimensional theoretical model was derived based on Tong＇s result in 1993, so as to the correlate power spectrum density （PSD） of a mirror surface to the intensity distribution of X-ray scattering. The two mirrors were measured on Beamline 16B at Shanghai Synchrotron Radiation Facility and the data were analyzed. The results showed that the root mean square of the surface roughness calculated using the model agreed well with that measured by a white-light 3D profiler.

关 键 词：功率谱密度(PSD) 均方根粗糙度(RMS) 掠入射X射线散射法(GIXRS) 超光滑表面 同步辐射光源 白光干涉法 

分 类 号：O766.3[理学—晶体学] TG84[金属学及工艺—公差测量技术]