PEN为衬底的柔性有机电致发光器件的光电性能  

Study of Flexible Organic Light-emitting Device Based on Poly(Ethylene Glycol)2,6-Naphthalate(PEN) Substrate

作　　者：李杰[1] 蒋亚东[1] 于欣格[1] 于军胜[1] 

机构地区：[1]电子科技大学光电信息学院电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《压电与声光》2012年第2期240-242,246,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60736005和61177032);创新研究团队资助项目(61021061);教育部博士点基金资助项目(20090185110020);中央高校基本科研业务费专项资助项目(ZYGX2010Z004)

摘　　要：采用直流磁控溅射技术,在聚对萘二甲酸乙二醇酯(PEN)柔性衬底上制备了氧化物铟锡(ITO)导电薄膜,研究了衬底温度和薄膜厚度工艺参数对柔性衬底上导电薄膜光学性能与电学性能的影响。在优化工艺的条件下,所制备的PEN导电基板的方阻低至35Ω/□,且可见光透过率大于95%;以此柔性ITO衬底为阳极,制备了结构为PEN/ITO/NPB/Alq3/Al的柔性有机电致发光器件。作为对比,选用多种不同的衬底材料制备了有机电致发光器件,并比较了各器件性能的差异。The indium tin oxide（ITO） conductive film has been prepared on the flexible poly（ethylene glycol）2,6-naphthalate（PEN） substrate by DC magnetron sputtering deposition method.The effect of the substrate temperature and film thickness parameters on the optical and electric performances of the conductive film has been investigated.The results show that the prepared PEN conductive substrate has a low square resistivity of 35 Ω/□ and a high transmittance in visible region is over 95%.Using the fabricated flexible ITO substrate as an anode,an organic light-emitting device consisting of PEN/ITO/NPB/Alq3/Al has been fabricated.Meanwhile,the devices with same structure using different substrates have also been fabricated to compare the discrepancy of the performance.

关 键 词：有机电致发光器件 聚对萘二甲酸乙二醇酯(PEN)柔性衬底 氧化物铟锡(ITO)薄膜 磁控溅射 

分 类 号：O484.4[理学—固体物理]