利用飞秒激光直写实现透明介电材料中三维维微微纳结构的制备与集成  

Fabrication and integration of three-dimensional micro/nano-structures inside dielectric materials using femtosecond laser direct writing

作　　者：何飞[1] 廖洋[1] 程亚[1] 

机构地区：[1]中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800

出　　处：《物理学进展》2012年第2期98-113,共16页Progress In Physics

摘　　要：本文综述了利用飞秒激光三维直写技术,在玻璃和晶体等透明介电材料中实现微流体、微光学、微电子学等一系列功能性微纳结构,并进一步构筑新型微纳光子器件的原理、技术与应用。We introduce the principles and techniques for fabrication of microfluidic, microoptic, and microelectronie components in dielectric materials by femtosecond laser direct writing, as well as integration of these functional components for construction of microdevices or microsystems. In addition, we review the major achievements we made during the past decade in this exciting young research field.

关 键 词：飞秒激光直写 微加工 介电材料 微流体 微光学 

分 类 号：TN249[电子电信—物理电子学]