电化学方法制备ZnO纳米颗粒掺杂类金刚石薄膜及其场发射性能研究  

The fabrication and field emission properties of ZnO nanoparticles-doped diamond-like carbon films by electrochemical deposition

作　　者：张培增[1] 李瑞山[2,3] 谢二庆[1] 杨华[2,3] 王璇[2] 王涛[4] 冯有才[2] 

机构地区：[1]兰州大学磁学与磁性材料教育部重点实验室,兰州730000 [2]兰州理工大学理学院,兰州730050 [3]兰州理工大学甘肃省有色金属新材料重点实验室,兰州730050 [4]西北师范大学物理与电子工程学院,兰州730070

出　　处：《物理学报》2012年第8期446-451,共6页Acta Physica Sinica

基　　金：兰州理工大学博士科研基金(批准号:BS10200904);教育部科学技术研究计划重点项目(批准号:211188)资助的课题~~

摘　　要：采用液相电化学沉积技术制备了ZnO纳米颗粒掺杂的类金刚石(DLC)薄膜,研究了ZnO纳米颗粒掺杂对DLC薄膜场发射性能的影响.利用X射线光电子能谱、透射电子显微镜、Raman光谱以及原子力显微镜分别对薄膜的化学组成、微观结构和表面形貌进行了表征.结果表明:薄膜中的ZnO纳米颗粒具有纤锌矿结构,其含量随着电解液中Zn源的增加而增加.ZnO纳米颗粒掺杂增强了DLC薄膜的石墨化和表面粗糙度.场发射测试表明,ZnO纳米颗粒掺杂能提高DLC薄膜的场发射性能,其中Zn与Zn+C的原子比为10.3%的样品在外加电场强度为20.7 V/μm时电流密度达到了1 mA/cm^2.薄膜场发射性能的提高归因于ZnO掺杂引起的表面粗糙度和DLC薄膜石墨化程度的增加.The formation of ZnO nanoparticles embedded in diamond-like carbon （DLC） thin film, deposited by electrochemical technique without post-processing, is observed. The effect of ZnO doping on the field emission （FE） property of DLC film is investigated. The chemical composition, the microstructure, and the surface morphologies of the sample are characterized by X-ray photoelec- tron microscopy, transmission electron microscopy, Raman spectrum, and atomic force microscope （AFM）. It is shown that the ZnO nanoparticles are of a wurtzite structure and the content of ZnO increases with Zn source increasing in electrolyte. The ZnO doping enhances both the graphitization and the surface roughness of the DLC film, which is verified by Raman spectrum and AFM. By the ZnO dopinm2 is obtained at an electric field of 20.7 V/p.m for the film with a Zn/（Zn＋C） ratio of 10.3g, the FE properties of the DLC film are improved. An emission current density of 1 mA/cat%. The improvement on the FE properties of the ZnO-doped DLC film is analyzed in the context of microstructure and chemical composition.

关 键 词：ZnO纳米颗粒 类金刚石薄膜 电化学沉积 场发射 

分 类 号：TB383.2[一般工业技术—材料科学与工程] O614.241[理学—无机化学]