非蒸散型薄膜吸气材料研究进展  

Latest Development of Non-Evaporable Getter Film Materials

作　　者：卜继国[1] 毛昌辉[1] 张艳[1] 尉秀英[1] 杜军[1] 

机构地区：[1]北京有色金属研究总院先进电子材料研究所,北京100088

出　　处：《真空科学与技术学报》2012年第4期341-346,共6页Chinese Journal of Vacuum Science and Technology

摘　　要：非蒸散型吸气薄膜是大型超高真空系统设备维持超高真空的重要材料,近来又成为基于物联网应用的MEMS器件维持可靠性和长寿命的关键材料。本文综述了非蒸散型薄膜吸气剂的基本原理、材料体系和制备技术,介绍了国内外吸气薄膜的材料现状、结构与性能、多功能化的最新进展,讨论了增大比表面积、调控纳米级精细结构的调控、实现多功能化和提高沉积精度是未来吸气薄膜技术的发展趋势。The latest progress in the field of the non-evaporable getter film materials was reviewed in a thought provoking way.The discussions centered on the gettering mechanisms of the NEG films,various types of NEG materials,advanced processing and functionalization technologies,and potential applications,particularly in packaging a variety of devices fabricated by micro-electro-mechanical-system technologies,now widely used in the assembling a variety of hardware for the Internet of things because of their high reliability and long life.In addition,the development trends in the research of the gettering materials,such as the nano-structure fabrication,increasing of specific surface,and functionalization,as well as its potential applications,were also tentatively discussed.

关 键 词：真空维持技术 非蒸散型吸气薄膜 磁控溅射法 纳米尺度精细结构 多层膜功能化 

分 类 号：TB43[一般工业技术]