高速钢镀C_3N_4/TiN复合超硬薄膜的研究  

Research on Depositing Superhard C 3N 4/TiN Compound Film onto HSS

作　　者：吴大维[1] 付德君[1] 刘传胜 高鹏 叶明生 彭友贵 范湘军 

机构地区：[1]武汉大学理学院,430072

出　　处：《工具技术》2000年第2期12-16,共5页Tool Engineering

基　　金：国家自然科学基金

摘　　要：采用DC反应磁控溅射和多弧离子镀相结合的方法,在高速钢基体上沉积C3N4/TiN复合超硬薄膜。用X光电子能谱(XPS)分析了氮化碳的元素组成。X射线衍射(XRD)和透射电子衍射(TED)分析证明,氮化碳以硬质结晶相存在。复合膜的显微硬度Hv=35.1～46.7GPa,划痕试验表明。By combination of DC reaction magnetron sputtering with multiple arc ion plating,the superhard C 3N 4/TiN compound film is deposited onto HSS base.The element composition of CN is analyzed by X ray electron energy spectrum(XPS).X ray diffraction (XRD)and transmission electron diffraction(TED) analyses show that CN exists in the form of hard crystalline phase.The microhardness Hv of the compound film is 35.1～46.7GPa.Scratch test proves that the adhesion of the film to its HSS base confirm with the JB/T8365 standard.

关 键 词：氮化碳 超硬材料 高速钢 深层刀具 复合膜 

分 类 号：TG711.06[金属学及工艺—刀具与模具]