耐环境性SiO_2/SiO_2-TiO_2增透膜的设计与制备  

Design and Preparation of SiO_2/SiO_2-TiO_2 Antireflective Coating with Excellent Environmental Resistance

作　　者：叶龙强[1] 张欣向[1] 肖波[1] 业海平[1] 江波[1] 

机构地区：[1]四川大学化学学院,绿色化学与技术教育部重点实验室,成都610064

出　　处：《高等学校化学学报》2012年第5期897-901,共5页Chemical Journal of Chinese Universities

基　　金：中央高校基本科研业务费(批准号:2010SCU23003)资助

摘　　要：根据膜层设计理论设计出以K9玻璃为基体的耐环境性的双层增透膜,这种增透膜在特定波长处具有超高的透过率.以盐酸为催化剂,分别以正硅酸乙酯和钛酸丁酯为前驱体制备了SiO2和TiO2溶胶,将SiO2和TiO2溶胶按一定比例混合得到SiO2-TiO2复合溶胶.通过改变复合溶胶中SiO2的含量调节复合膜的折射率,通过改变提拉速度控制薄膜的厚度.实验结果表明,双层增透膜在550 nm处的透过率达到99.9%.增透膜经较强机械摩擦后峰值透过率基本保持不变,表明该增透膜具有优良的耐摩擦性.进一步采用六甲基二硅氮烷对增透膜表面进行修饰,修饰后增透膜的接触角增大至98.3°,增透膜的疏水性及环境稳定性得到较大提高.Double-layer antireflective（AR） coatings on K9 glass with excellent environmental resistance and abrasion-resistance were designed and prepared.Using tetraethylorthosilicate（TEOS） and titanium tetraisopropoxide（TTIP） as precursor,respectively,SiO 2 and TiO 2 sols were prepared via sol-gel process with hydrochloric acid as catalyst.SiO 2-TiO 2 composite films were prepared by mixing the SiO 2 and TiO 2 sols and then dip-coating on the substrates.The refractive indices of the composite films were controlled by adjusting the SiO 2/TiO 2 ratio and the thickness was controlled by adjusting the dip-coating speed.It was found that the maximum transmittance of the double-layer AR coatings reached 99.9% and could be adjusted to match a specific wavelength.The transmittance did not decrease after abrasion test,indicating an excellent abrasion-resistance of the AR coating.Hydroxyl terminated hexamethyldisiloxane（HMDS） treatment was further performed to improve the hydrophobicity,the environmental resistance and durability of the AR coatings.

关 键 词：膜层设计 耐环境性 耐摩擦性 双层增透膜 高透过率 六甲基二硅氮烷 

分 类 号：O613[理学—无机化学]