玻璃微-纳流控芯片的制备及在蛋白质电动富集中的应用  

Fabrication of Micro/Nanofluidic Chip on Glass Substrate and Its Application for Electrokinetic Concentration of Proteins

作　　者：董媛媛[1] 胡贤巧[1] 陈双[1] 庐华[1] 何巧红[1] 陈恒武[1] 

机构地区：[1]浙江大学化学系,微分析系统研究所,杭州310058

出　　处：《高等学校化学学报》2012年第5期931-936,共6页Chemical Journal of Chinese Universities

基　　金：国家自然科学基金(批准号:20890020);浙江省自然科学基金(批准号:Y4100254)资助

摘　　要：发展了一种以"二次刻蚀"技术制备玻璃微-纳流控芯片的新方法.首先,采用紫外光刻和化学湿法刻蚀技术在玻璃基片上加工微米深度的微通道;去除剩余的光胶后,在刻有微通道的基片上旋涂一层新的光胶;再通过二次紫外光刻和湿法刻蚀在该基片上加工深度小于100 nm的纳通道;最后,采用室温键合技术,将带有微纳结构的基片与盖片封合制成玻璃微-纳流控复合芯片.利用本方法可以在普通化学实验室以简易的设备制得具有微-纳米复合结构的玻璃芯片.将此玻璃微-纳流控复合芯片成功地应用于以电动离子捕集技术富集荧光素钠异硫氰酸酯(FITC)标记的人血清蛋白(HSA).结果表明,对于0.5 mg/mL的FITC-HSA,30s内富集倍率可达到200倍以上.A simple and cost-effective double-lithography and double wet-etching method（abbriciated as double-etching technique） was developed for fabricating the full glass chips with hybrid micro- and nanochannels.The microchannels were firstly constructed on a glass substrate by standard UV photolithography and wet etching technique.After washing away the rest photoresist and spin coating of a new layer of photoresist on the microchannel-structured glass substrate,nanochannels with a depth less than 100 nm were prepared on the same substrate by second lithography and wet etching.Finally,the channel-structured glass substrate was sealed to a cover glass plate using room temperature bonding technique.Without clean room facilities and expensive facilities,fluidic chips with hybrid micro- and nanochannel network were fabricated with high yields.The analytical features of those fluidic chips were demonstrated by the successful concentration of fluorescein isothiocyanate（FITC）-labeled human serum albumin（HSA） via electrokinetic ion trapping.Enrichment factor of more than 200 was achieved for 0.5 mg/mL of FITC-HSA solutions within 30 s.

关 键 词：芯片加工 二次刻蚀技术 微-纳流控芯片 蛋白富集 

分 类 号：O657[理学—分析化学]