固结磨料化学机械研抛K9玻璃的材料去除机理  

Material Removal Mechanism of K9 Glass During Chemical Mechanical Polishing by Fixed Abrasive Pad

作　　者：樊吉龙[1] 朱永伟[1] 李军[1,2] 叶剑锋[1] 

机构地区：[1]南京航空航天大学机电学院,南京210016 [2]中国科学院功能晶体与激光技术重点实验室,北京100190

出　　处：《纳米技术与精密工程》2012年第3期278-283,共6页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(51175260;50905086);江苏省自然科学基金资助项目(BK2010512)

摘　　要：采用失重法对固结磨料研抛K9玻璃材料去除过程中的机械与化学作用进行了分离,采用显微硬度方法分析了研抛液对K9玻璃工件表层硬度的影响.研究结果表明:研抛液能与K9玻璃发生化学反应并在其表面形成一层较基质材料软的变质层,变质层厚度随浸泡时间的延长而增加;单纯研抛液的化学作用对K9玻璃的材料去除作用有限,固结磨料研抛垫对K9玻璃的机械去除作用主要以脆性去除为主,化学与机械的交互作用是K9玻璃影响材料去除的主要方式;当研抛盘转速为200 r/min时,化学作用与机械作用达到平衡,交互作用最为强烈,材料去除率达到最大值.The mechanical and chemical functions during the material removal process are separated by adopting weight loss measurements when fixed abrasive pad works on K9 glass.The influence of polishing slurry on the surface hardness of K9 glass is also analyzed by the micro-hardness method.The research results show that the chemical reaction between polishing slurry and K9 glass will take place and form a denatured layer on the surface of K9 glass,which is softer than host material and whose thickness increases with soak time.The material removal rate of K9 glass by chemical function is very limited and the mechanical function of K9 glass is mainly by brittle removal,while the interaction of chemical and mechanical functions is the main factor in influencing the material removal rate of K9 glass.When the rotation speed of the polishing pad is 200 r/min,the chemical and mechanical functions come to a balance with their interaction being the strongest,and the material removal rate reaches its maximum.

关 键 词：化学机械研抛 固结磨料研抛垫 变质层 材料去除机理 

分 类 号：TG580.2[金属学及工艺—金属切削加工及机床]