纳秒激光电化学复合掩模的微细加工  

Nanosecond Laser Electrochemical Compound Masking Microfabrication

作　　者：王耀民[1] 张朝阳[1] 李中洋[1] 毛卫平[1] 

机构地区：[1]江苏大学机械工程学院,江苏镇江212013

出　　处：《微纳电子技术》2012年第5期336-339,349,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(50975127);教育部博士点新教师基金资助项目(20093227120006);中国博士后基金特别资助项目(201003558);江苏省自然科学基金资助项目(BK2011522);江苏大学第九批学生科研课题立项资助项目(09A142)

摘　　要：在激光传输光路中加入掩模对激光束进行空间调制,采用纳秒脉冲激光器、纳秒脉冲电源和1 mol/L的NaNO3电解液对304不锈钢进行掩模微刻蚀加工试验研究。利用伏安法测定304不锈钢阳极电流随平均电压的变化规律;选用平均电压1.5 V、脉冲频率2.0 MHz、脉冲宽度60 ns、激光能量160 mJ的工艺参数,在所构建的试验系统中,分别进行了激光电化学复合掩模和盐溶液中的激光掩模加工试验。结果表明:在阳极钝化区内,纳秒脉冲激光电化学复合加工能够显著提高加工速率和加工表面质量,实现了线宽约为130μm、热影响区小的微细刻蚀加工,证实了纳秒脉冲激光电化学掩模加工在微细加工中具有很大潜力。The spatial modulation effect on laser was achieved by integrating the mask into the transmis- sion optical path. The micro-machining process for the 304 stainless steel was studied with the nanose- cond pulse laser, nanosecond pulse power supply and NaNO3 electrolyte of 1 mol/L. The change of the anode current for the 304 stainless steel with the average voltage is measured by the voltam- merry method. In the founded experimental system, the laser electrochemical compound masking machining experiment and the laser masking machining experiment in the sodium nitrate solution were carried out with the average voltage of 1.5 V, the pulse frequency of 2.0 MHz, the pulse width of 60 ns and the laser beam energy of 160 mJ, respectively. The results show that the ma- chining rate and surface quality are improved significantly by the electrochemical combined machi- ning in the anodic passivation region, the microfabrication with about 130 μm line width and the less heat affected zone are achieved, and the great potential is confirmed through the nanosecond pulse laser electrochemical masking processing in the microfabrication.

关 键 词：纳秒脉冲 激光电化学 复合加工 掩模 微细加工 

分 类 号：TH703[机械工程—仪器科学与技术] TN305.7[机械工程—精密仪器及机械]