微机电系统折叠梁开关低功耗方法研究与仿真  

Research and Simulation of Mems Folding Beam Switch Low Power Consumption Method

作　　者：宋明歆[1] 殷景华[1,2] 郭海[1,3] 

机构地区：[1]哈尔滨理工大学应用科学学院,黑龙江哈尔滨150080 [2]哈尔滨理工大学工程电介质及其应用技术教育部重点实验室,黑龙江哈尔滨150080 [3]大连民族学院计算机科学与工程学院,辽宁大连116600

出　　处：《计算机仿真》2012年第5期404-407,共4页Computer Simulation

基　　金：黑龙江省教育厅科学技术研究项目(12511076)

摘　　要：研究微机电系统中的功率消耗优化问题。微机电系统中利用折叠梁开关中的电容充放电控制一些大型的电路,当开关需要驱动较为复杂的电路时,为达到驱动效果,开关需要较大弹性系数的电容。传统的微机电系统工作原理中,电容的弹性系数和驱动电压成正比。过大的电容弹性系数将导致驱动电压过大,消耗的有效功率过高。为此,提出一种弹性敏感动态参数优化方法。通过建立折叠梁开关电容弹性系数的动态估计模型,确定功率的变化敏感性,通过充分研究电容弹性系数的动态估计模型,确定系统功耗与弹性系数的关联程度,保证参数时域内达到最优。实验表明,改进方法有效降低了微机电系统的功率消耗,取得了较好的效果。Research the power consumption optimization of microelectromechanical system.In microelectromechanical system,the capacitance charging and discharging of folding beam switch are used to control a few large circuits,when the switch need to drive more complex circuits,the capacitance with larger elastic coefficient is needed for effective driving.In the traditional working principle of MEMS,the capacitance elastic coefficient is proportional to the driving voltage.Large capacitance elasticity coefficient will lead to excessive driving voltage,the consumption of effective power is too high.The paper put forward an elastic sensitive dynamic parameters optimization method.The dynamic elastic coefficient estimation model of folding beam switching capacity was established to decide the power change sensitivity.Through the full study of the estimation model of dynamic capacitance elastic coefficient,the relationship between power consumption of the system and the elastic coefficient was determined to guarantee the optimal parameters in time domain.The experiment results show that the method can reduce the power consumption of microelectromechanical system and has good results.

关 键 词：微机电系统 微波开关 弹性系数 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]