旋涂法制备声表面波化学传感器膜的研究  

Study on SAW Sensor Polymer Film Prepared with Spin-coating Method

作　　者：付曙霞[1,2] 马晋毅[3] 江洪敏[3] 黄发荣[1] 

机构地区：[1]华东理工大学材料科学与工程学院特种功能高分子材料及其相关技术教育部重点实验室,上海200237 [2]中国船舶重工集团公司第七一八研究所,河北邯郸056027 [3]中国电子科技集团公司第26研究所,重庆400060

出　　处：《压电与声光》2012年第3期325-328,共4页Piezoelectrics & Acoustooptics

摘　　要：声表面波化学传感器因高灵敏、便携而快速等优点被用来检测有毒有害气体。聚合物在声表面波敏感器件表面的旋涂技术是研究的热点。用旋涂法把溶于丙酮的氟硅氧烷聚合物溶液在声表面波器件表面制备成膜。通过网络分析仪,对在基片不同的旋涂区域和不同聚合物粘度对敏感芯片的品质因数和插入损耗的差异的分析、对比,确定环基片中心区为成膜的最佳旋涂区域,聚合物溶液增比粘度小于0.34时对成膜质量影响较小。Surface acoustic wave （SAW） gas sensor is often used to monitor toxic or hazardous gases,for it exhibits high sensibility,convenience, fast response and other advantages. The spin-coating technique of the polymer film on the surface of SAW sensing device has become a hot spot. In this method, the Silicon-based fluoroalcohol polymer is dissolved in acetone and coated on the surface of SAW device using spin coating method. By a network an- alyzer, the quality factor （Q） and insertion losses （dB） are measured to determine the influence of different areas of SAW gas sensors and different viscosity of polymer to prepare SAW gas sensors. It is concluded that the ring center area on surface acoustic wave substrate is the best film area and specific viscosity less than 0.34 should be accepted.

关 键 词：声表面波 化学传感器 聚合物 粘度 成膜 

分 类 号：TN212[电子电信—物理电子学]