中红外带通滤光片的设计与制备  

Design and preparation of mid-infrared bandpass filter

作　　者：陈朝平[1] 师建涛[1] 郭芮[1] 白波 杨崇民[1] 郭鸿香[1] 

机构地区：[1]西安应用光学研究所,陕西西安710065 [2]驻西安北方光电集团军事代表室,陕西西安710065

出　　处：《应用光学》2012年第3期595-598,共4页Journal of Applied Optics

摘　　要：中红外带通滤光片在航天、气象、遥感等领域有着重要的应用,峰值透过率和通带半宽度是带通滤光片的重要指标,主要取决于光学薄膜的膜系结构和具体设计。论述了一种在锗基底上采用锗和硫化锌两种材料设计并成功制备出中红外带通滤光片的方法。详细介绍了镀膜材料的选择以及这种方法的设计理论,给出了膜系结构,运用离子辅助沉积工艺在ZZSX-1100镀膜机上制备出了这种滤光片,测试结果表明:所制备的滤光片峰值透过率达到87%以上,通带半宽度为70nm,光谱性能稳定,膜层致密,附着力好,膜系结构简单,易于实现。The mid-infrared bandpass filter is widely used as an observation channel in applications such as flight,meteorology and remote sensing.The peak transmission and full width at half maximum（FWHM） are key specifications of the bandpass filter,which depend on the film structure and its design.The mid-infrared bandpass filter was successfully prepared using a new method with Ge and ZnS materials on Ge substrate.The selection of materials and the design principles of this method were introduced in detail,the film structure is also given.By using ZZSX-1100 device,this kind of filter was deposited with ion beam assisted process.The mea-surement results show that its peak transmission is more than 87% and the FWHM is 70 nm.The filter has good optical spectrum stability and adherence.The film structure is simple and easy to implement.

关 键 词：中红外带通滤光片 薄膜 离子辅助沉积 通带半宽度 峰值透过率 

分 类 号：TN205[电子电信—物理电子学] O484.4[理学—固体物理]