自动清洗的变速控制方法  

The Variable Speed Control Method of the Cleaning

作　　者：郝鑫[1] 白雪峰[1] 白宇[1] 马岩[1] 荣宇[1] 

机构地区：[1]沈阳仪表科学研究院,辽宁沈阳110043

出　　处：《中国集成电路》2012年第5期54-56,共3页China lntegrated Circuit

摘　　要：全自动划片机是融合精密机械、电子、软件、材料、自控、光电、元器件等多学科技术为一体的IC装备。高速清洗系统作为全自动划片产品的重要组成部分,直接影响着设备整体工作的质量和效率。本文对清洗系统的变速控制和精确回零技术做了初步的探讨。伺服系统采用内部速度模式的变速控制方法,解决了大转动惯量下位置控制无法稳定的问题。清洗完成后,系统寻址高精度传感器,完成清洗台上下料的回零定位。Fully Automatic Dicing Saw is an IC equipment which is the integration of precision machinery, electronics, software, materials, self-control, photoelectric components, and the multi-disciplinary technology. As an important component of the automatic dicing products, high-speed cleaning system has a direct impact on the quality and efficiency of the equipment. This paper conducts a pilot study on the variable speed control technology and the return-to-zero technology applied to the cleaning system. The problem that position control is unstable under the large moment of inertia can be solved by applying the variable speed control method of the internal speed mode to the servo system. After cleaning, the system addresses the high-precision sensor, repositions the cleaning table to zero point.

关 键 词：变速控制方法 伺服系统 

分 类 号：TN405[电子电信—微电子学与固体电子学]