一种MEMS同振柱型仿生矢量水听器的研制  

Research of the MEMS Resonant-Column Type Bionic Vector Hydrophone

作　　者：刘林仙[1,2] 张国军[1,2] 许姣[1] 张文栋[1,2] 薛晨阳[1,2] 葛晓洋[1] 张慧[1] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学电子测试技术重点实验室,太原030051

出　　处：《传感技术学报》2012年第4期448-452,共5页Chinese Journal of Sensors and Actuators

基　　金：国家863计划项目(2011AA040404)

摘　　要：提出了一种结合MEMS技术、仿生原理和压阻原理的同振柱型矢量水听器,即由二维仿生水听器和声压水听器组合而成的柱体。在声学理论基础上详细介绍了该水听器的封装设计及制作过程,在国防水声一级计量站对该矢量水听器进行校准实验,实验结果表明:该同振型矢量水听器的工作频带范围为0～3 kHz;X通道灵敏度-177.9 dB(2 kHz),Y通道灵敏度-175.4 dB(2 kHz),声压通道灵敏度-175.8 dB(2 kHz);具有很好的"8"字指向性;可承受3 MPa压力。此新型MEMS同振矢量水听器适用于民用船只避障,渔业捕捞,海洋勘探等领域。A Resonant-column Type Vector Hydrophone based on MEMS technology and bionic principle was presented, which consists of two-dimensional bionic hydrophone and pressure hydrophone. Based on acoustic theory, the design and manufacture of the vector hydrophone are described in detail. In order to verify the function of the hydropbone, preliminary characterization tests of the hydrophone were performed in National Defense Underwater Acoustics Calibration Laboratory of China. Results show that working frequency band is 0 - 3 kHz; X-channel sensitivity is-177.9 dB （2 kHz）, Y-channel sensitivity is -175.4 dB （2 kHz）, pressure channel sensitivity is -175.8 dB（2 kHz）. And the Resonant-column Type Bionic Vector hydrophone not only possesses a good ＂8＂ directional pattern but also can withstand a 3 MPa pressure. The application of this novel MEMS Resonant-column Type Bionic Vector Hydrophone is broad, included from civil ships＇ evading bonds, fishery to hydrospace detection.

关 键 词：MEMS 同振柱型 仿生 矢量水听器 

分 类 号：TB565.1[交通运输工程—水声工程]