MOEMS三分量加速度地震检波器简谐振子设计(英文)  

Design of harmonic oscillator for MOEMS three-component acceleration seismic geophone

作　　者：恩德[1] 冯捷逾[1] 张宁波[1] 

机构地区：[1]河南理工大学电气工程与自动化学院,河南焦作454000

出　　处：《量子电子学报》2012年第3期362-367,共6页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金(41074090);中国博士后科学基金(2005038468);河南省科技计划重点攻关项目(022102210360);河南省控制工程重点学科开放基金项目(KG2009-12)资助

摘　　要：采用惯性力与简谐振子相垂直及差动检测技术的方法,设计基于光弹效应的三分量加速度地震检波器简谐振子。对于简谐振子中的双M-Z干涉仪而言,光功率的均分和光的单模传输是实现正确检测加速度的基础。介绍了M-Z干涉仪的结构和工作原理。用波导光学模拟软件OptiBPM v9.0对双M-Z干涉仪光场传输进行仿真,得到双M-Z干涉仪的光场传输图。从仿真结果可以看出,从激光器LD发出的光经过双M-Z干涉仪后,1/4分支波导的光场峰值都达到了0.52,分光比达到了1:1:1:1,实现了光功率的均分,设计的简谐振子满足三分量加速度地震检波器实现正确检测加速度的要求。The harmonic oscillator of three-component acceleration seismic geophone based on photoelastic effect is designed by the methods of inertia force perpendicular to the harmonic oscillator and differential detection technology. In terms of dual M-Z interferometer of three-component acceleration seismic geophone, equal division of optical power and single-mode transmission of light are the bases of correct acceleration detection. The structure of M-Z interferometer is introduced. The optical field transmission of dual M- Z interferometer in three-component acceleration seismic geophone is simulated by the waveguide optics simulation software OptiBPM v9.0, and the optical field transmission graph of dual M-Z interferometer is obtained. The simulation result shows that when the light emitted from the laser passes through the dual M-Z interferometer, the optical field peak values of 1/4 branch waveguides all achieve 0.52, and the splitting ratio is hhl：l. The equal division of optical power is realized, and the harmonic oscillator designed meets the demand of proper acceleration detection of three-component acceleration seismic geophone.

关 键 词：纤维与波导光学 简谐振子 M-Z干涉仪 光弹效应 三分量 

分 类 号：TN4[电子电信—微电子学与固体电子学]