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机构地区:[1]淮南联合大学,淮南232038
出 处:《低温与超导》2012年第6期83-86,共4页Cryogenics and Superconductivity
摘 要:随着工业精密测量对于精度和分辨率的要求越来越高,光学探头在工业精密测量中得到了广泛的应用。由于DVD读取头的聚焦误差信号FES(Focus Error Signal)即S曲线的一部分与失焦距离成线性关系,因此稍作改进就可以做光学探头,用来进行微小位移的测量[1]。文中给出了其电路设计,该电路分成两个部分,一个是LD功率自动控制电路,一个是FES获取电路。经过实验测试,利用该电路可以获得良好的S曲线,可实现对微器件(几何尺寸数毫米至数微米,精度参数多为微纳米数量级)的精确测量。该电路设计具有结构简单、抗干扰能力强等突出优点。As the industrial precision measurement demands more and more high accuracy and resolution,the optical probe has been widely used in industrial precision measurement.The focus error signal(FES) of DVD pickup head,namely S-curve,the part of which has a linear relationship with the out-of-focus distance.So we can take the structure of DVD pickup head for the optical probe with a little improvement,so as to measure the micro-displacement.In the study we have designed a new circuit,the circuit includes focus error signal of the DVD(S curve) processing circuit,LD control circuit etc.By tests,we can get a good S-curve through the circuit,and we could achieve the accurate measurement of the micro-component(geometric dimensions for a few millimeters to a few microns,more precision parameters for the micro nanometer scale).It has simple structure,anti-interference capability,and other outstanding features.
关 键 词:DVD激光读取头 聚焦误差信号 S曲线 光学探头
分 类 号:TN402[电子电信—微电子学与固体电子学]
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