通过数据处理实现微细台阶面的测量  

Measurement of Stair like Surfaces' Topography by Data-processing

作　　者：周明宝[1] 林大键[1] 郭履容[2] 郭永康 

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室,成都610209 [2]四川联合大学物理系,成都610041

出　　处：《中国激光》2000年第3期219-223,共5页Chinese Journal of Lasers

摘　　要：分析了微细台阶面表面形貌测量可能会出现平滑或失真现象的根源 ,提出一种基于测量数据分析和数据处理的解决方法。此方法已成功地应用于自行研制的衍射光学元件三维表面形貌测量系统中。The reason why the measuring results are probably wrong when measuring the topography of stair like surfaces is analyzed, and the new data processing method is presented, which can be applied to correct the measuring results of stair like surfaces’ topography. The method has been successfully used in the system for measuring the 3 D surface topography of diffractive optical elements.

关 键 词：微结构 表面形貌 数据处理 相移干涉 测量 

分 类 号：TN307[电子电信—物理电子学]