基于宽光谱的嵌入式膜厚监控系统  

Embedded Optical Film Thickness Monitoring System Base on Wide-Band Spectrum Measurement

作　　者：张沛强[1] 罗宇强[1] 王巧彬[1] 

机构地区：[1]广州市光机电技术研究院广东省现代控制与光机电技术公共实验室,广东广州510663

出　　处：《机电工程技术》2012年第5期22-25,共4页Mechanical & Electrical Engineering Technology

基　　金：广东省科技基础条件建设项目(编号:2009B060200004)

摘　　要：为了实时准确监控光学镀膜膜层厚度,基于宽光谱扫描法,结合嵌入式控制技术,开发出一套以ARM9与Linux系统的高效嵌入系统为基础,应用于光学镀膜工艺过程监控镀膜层厚度的监控系统。本系统能通过在薄膜生长过程中实时、高精度地测量其宽光谱特性,对镀膜过程进行自动控制。详细阐述了该系统的工作原理、硬件系统和软件系统,实验结果表明,系统具有较高的监控能力,性能稳定。In order to monitor the optical film thickness, this paper develops a kind of embedded optical film thickness monitoring system based on the real-times spectrum measurement and the embedded controlled technology. The monitoring system combines with the ARM9 and Linux embedded operating system, which can monitor the wide-band spectrum and development the accuracy and automatization of optical film thickness monitoring. This paper elaborates the working principle, hardware and software systems of the system in detail. The result showed that the system can be verified to be useful in certain area.

关 键 词：宽光谱 嵌入式 膜厚监控 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]